■ MED 020 模組化覆層單元 ■

MED 020 是一部利用高效率渦輪分子幫浦達到高真空的前處理設備，單一機台即可應用於大部分的覆層處理，如：濺鍍、電阻式蒸鍍、電子束蒸鍍等。可應用於冷凍蝕刻、冷凍乾燥、冷凍破裂等

※ 模組化工作平台，複數高解析覆層系統

※ 前處理樣品製備

※ 多變化的模組以適合各種應用

※ 渦輪分子幫浦確保高潔淨度真空

※ 覆層、真空量測及幫浦統一控制

■ MED 020 Freeze Drying Unit ■

The MED 020 Freeze Drying Unit is an ideal system for precision controlled freeze drying of SEM samples or TEM cryo sections. The modular design of the MED 020 allows retrofitting the device for various applications.

※ Reproducible results through exact temperature control
　 of specimen cold stage

※ Contamination free transfer of specimens through
　 counter flow loading device

※ Protection against contamination based on integrated
　 'Meissner' trap

※ Subsequent coating through DC sputtering or
　 evaporation