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[ 電子顯微鏡前處理設備 | S.E.M ]

■ Sputter Coater - 鍍金機
108 Auto Sputter Coater SPEC.
◇ Manual or automatic operation
◇ Simple easy-touch front panel push button controls (microprocessor based system operation)
◇ Planar Magnetron sputter head to minimize sample heating
◇ Integrated all metal vacuum lines,O-ring seals and QF connection system for rapid pump down
◇ Constant current feedback controlled power supply(operates independent of pressure)
◇ Optional thickness monitor with thickness termination function for repetitive results
◇ Excellent price performance
208 HR Sputter Coater SPEC.
◇ Manual or automatic operation
◇ Specially tailored to coat high resolution FE-SEM samples
◇ Precision control in the 0.5-3.0nm range
◇ HI/LOW vacuum chamber design for rapid working distance adjustment
◇ Includes thickness monitor with terminator for reproducible film  thickness
◇ Includes Rotary/Planetary/Tilting stage for evenly distributed coatings on multiple samples
◇ Includes all metal integrated vacuum system using ISO and QF connection system
◇ Includes Cr and Pt/Pd sputter targets
◇ Optional oil free vacuum system

■ Carbon Coater - 鍍碳機
108 Auto Carbon Coater SPEC.
◇ Manual or automatic operation
◇ Digital and Analog front panel controls(Microprocessor based system operation)
◇ Integrated all metal vacuum lines,O-ring seals and QF connection system for rapid pump down
◇ Digital power and timer settings
◇ Optional thickness monitor for reproducible file thickness
◇ Rod fed evaporation source allows for multiple runs before needing replacement
◇ Feedback controlled power supply to control and stabilize deposition
◇ Excellent price performance
208 Turbo Carbon Coater SPEC.
◇ Manual or automatic operation
◇ Versatile HIGH/LOW vacuum operation to optimize carbon film to SEM,TEM or Microprobe requirements
◇ Feedback controlled power supply for exceptional evaporation source stability
◇ Optional thickness monitor for highly reproducible film thickness
◇ Penning/pirani vacuum measuring system
◇ Optional Rotary/Planetary/Tilting stage for evenly distributed coatings on multiple samples
◇ Rapid change over to other accessories using convenient top plate "drop in" system
Sputter Coater 鍍金機 Carbon Coater 鍍碳機 鍍金鍍碳機
   
 
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update： 2020-03-27