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| [ 電子顯微鏡 | 聚焦離子束掃描式電子顯微鏡 | FIB_SEM XMU ] |
| ■ FIB_SEM XMU聚焦離子束掃描式電子顯微鏡可變真空系統(高/低真空機型) ■ |
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The is a favorable combination of the electron and ion sources and optical columns attached on one chamber. It extends imaging qualities of the scanning electron microscope with the possibility of surface modification by a focused ion beam. |
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| 》SEM Specific Features |
- A unique four-lens Wide Field Optics? design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimization
- Fast imaging rate, using first class YAG detectors
- Fully automated microscope set-up including electron optics set-up and alignment
- Live stereoscopic imaging for accurate 3D navigation
- Network operations and built-in remote access/diagnostics, all come as a Tescan standard
- 5-axis fully motorized compucentric stage with extra wide range of movements
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| 》FIB Specific Features |
- Unique ion optic column differentially pumped, with 2 ion pumps, for ultra-low ion scattering effect
- Motorized aperture changer with ultra-high reproducibility
- Beam Blanker and Faraday cup included as a standard
- Simultaneous SEM imaging with FIB etching or deposition
- FIB control is fully integrated in the SEM software
- Powerful toolbox for basic shapes creation with programmable process parameters
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| 》GIS Option Features |
- Ideal geometrical configuration with respect to SEM and FIB columns
- 5 independent gas reservoirs with capillaries
- 3-axis microstage with automatic nozzles positioning
- Automated temperature control
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》 Models
- XMH - A high vacuum variant of FIB-SEM
- XMU - A variable pressure FIB-SEM with an extended facilities for low vacuum SEM investigation.
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》The XMU Essential Specifications:
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SEM |
FIB |
| Electron/ Ion Gun |
Tungsten heated filament |
Ga liquid metal ion source |
| Resolution |
3.5 nm at 30 kV |
<5 nm at 30 kV |
| Magnification |
3× – 1,000,000× |
150× – 1,000,000× |
| Accelerating Voltage |
200 V to 30 kV |
1 kV to 5 kV;
10 kV to 30 kV |
| Probe Current |
1 pA to 2 μA |
1 pA to 20 nA |
| Gun vacuum |
< 1 × 10 -2 Pa |
< 5 × 10 -6 Pa |
Chamber Vacuum
High Vacuum Mode
Medium Vacuum Mode
Low Vacuum Mode |
< 1 × 10 -2 Pa
3-150 Pa
3-500 Pa |
< 1 × 10 -2 Pa
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| Scanning |
Working Modes |
Resolution, Depth, Field, Wide Field, Rocking Beam, 3D Beam Live stereoscopic imaging, E-Beam induced deposition*1, E-Beam Litography |
Imaging, SEM-FIB Simultaneous Imaging, Etching, Polishing, Selective etching*1, I-Beam induced deposition*1 |
| Scanning Features |
Focus Window, Dynamic Focus, Point & Linescan, Tilt Correction, 3D Beam |
Focus window, Poin, Line, Rectangle, Circle, Ring, Staris, Bitmap, Text |
| Scanning Speed |
160 ns to 10 ms per pixel |
160 ns to 10 ms per pixel |
| Digital Output |
Image size |
up to 8,192×8,192 pixels |
| Bit Depth |
16-bits per channel |
| System control |
PC Control |
All functions are fully PC controlled by means of the LyraTC GUI software on a Windows? platform |
| Controlers |
trackball |
| Chamber XM |
Internal Dimensions |
300 mm (width) x 300 mm (depth) |
| Door Size |
280 mm (width) x 310 mm (height) |
| Number of Ports |
9 + |
| Chamber Suspension |
pneumatic or optional active vibration isolation |
| Specimen Stage |
Type |
5-axis fully motorized, compucentric |
| Movements |
X = 130 mm
Y = 130 mm
Z = 100 mm
Rot.: 360° continuous
Tilt*2: -20° to +80° |
| Maximum Specimen Height |
137 mm |
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*1： Only if GIS option is installed
*2： Standard number and configuration of ports can be modified to customer needs from WD 15 mm and for eucentric height of the specimen |
| 》Detectors |
》Accessories |
| SE Everhardt-Thornley |
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| Retractable BSE |
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| LVSTD |
○ |
| TE Detector |
○ |
| CL Detector |
○ |
| EBIC |
○ |
| EDX* |
○ |
| EBSD* + |
○ |
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| Probe Current Measurement |
● |
| Touch Alarm |
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| IR Chamber View Camera |
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| FIB Beam Blanker |
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| SEM Beam Blanker |
○ |
| Gas Injection System* |
○ |
| Active Vibration Isolation* |
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| Magnetic Field Cancelling System* |
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| Nanomanipulators* |
○ |
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● standard, ○ option, – not available
* Fully integrated third party tools
+ EBSD is not available if GIS option is installed |
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