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[ 特殊顯微鏡設備 | Wafer Probing | 標準型 12 "用 ]

Analytical Probe Station/4點探針/探針量測儀
Manual Probe Station for wafer 12"/標準型12"晶圓用

 
Model:ED-12

 

Features

  Coaxial-Driven Chuck Stage

RF Probing Field Upgradable

20X~4000X Magnification

Backlash-Free Movement

Choice Of Microscope (Tilt) Up/Down

For E-Z Revolving Objevtives

Specifications

Vacuum Chuck

12" Stainless Steel

Chuck Stage

12" x12" Travel

Chuck Theta

0~30 degree

Platen Up/Down

4mm Adjustable

Platen

12 Micropositioner

Microscope Stage

1" x1" Travel

Requirements

Electrical

110 VAC, 60Hz

220 VAC, 60Hz

Vacuum

-250 mmHg, 7 liter/min

Dimensions

920mmW x 660mmD x 700mmH With Microscope

Weight 180 Kg  With Microscope

Accessories

RF Probe / Cables

Active Probes

Low Current / Capacitance Probes

High Voltage Probes

Laser Cutter

Ultrasonic Cutter

CCTV System

Photomicrographics

Probe Card holder

Packaged Device Holder

PCB Holder

Thermal Chuck

Liquid Crystal Kit

Vibration Free Table

Shielding Box

Test Bench

Instrument Case With Caster

Microscope Quick Lift

Dark Field / Normarski Inspection

Chuck Vacuum Pattern

Gold Plated Chuck

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update: 2012-05-08