|
Features |
| |
Coaxial-Driven Chuck Stage |
|
RF Probing Field Upgradable |
|
20X~4000X Magnification |
|
Backlash-Free Movement |
|
Platen Linear Quick Up/Down
|
| Easy Load/Unload wafer |
|
Platen Linear Fine Up/Down
|
| Probe Card Tip Overdrive Adjustment |
|
|
|
Specifications |
|
Vacuum Chuck： |
8" Stainless Steel |
|
Chuck Stage： |
8" x8" Travel |
|
Chuck Theta： |
0~30 degree |
Platen Up/Down：
|
6mm Adjustable
|
| Coarse Adjustment： |
Lever-Driven |
|
Platen Up/Down：
Fine Adjustment： |
25 mm Adjustable
Hand Wheel-Driven |
|
Platen： |
12 Micropositioner |
|
Microscope Stage： |
1" x1" Travel |
|
|
|
Requirements |
|
Electrical |
110 VAC, 60Hz |
|
Vacuum |
-250 mmHg, 7 liter/min |
|
|
|
Dimensions |
|
780mmW x 660mmD x 700mmH With Microscope |
|
Weight 80 Kg With Microscope |
|
|
|
Accessories |
|
Wafer Chuck Pull-out Stage |
|
Miroscope Tilting Mechanism |
|
RF Prone/Cables |
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Active Probes |
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Low Current/Capacitance Probes |
|
High Voltage Probe |
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Laser Cutter |
|
Ultrasonic Cutter |
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CCTV System |
|
Photomicrographics |
|
Probe Card holder |
|
Packaged Device Holder |
|
PCB Holder |
|
Thermal Systems |
|
Liquid Crystal Kit |
|
Vibration Free Table |
|
Shielding Box |
|
Test Bench |
|
Instrument Case with Caster |
|
Dark Field/Normarski Inspection |
|
Chuck Vacuum Pattern |
|
Gold Plated Chuck |
