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Features |
|
Coaxial-Driven Chuck Stage |
|
RF Probing Field Upgradable |
|
20X~4000X Magnification |
|
Backlash-Free Movement |
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Platen Linear Quick Up/Down
Easy Load/Unload wafer |
|
Platen Linear Fine Up/Down
Probe Card Tip Overdrive Adjustment |
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|
|
Specifications |
|
Vacuum Chuck： |
6" Stainless Steel |
|
Chuck Stage： |
6" x6" Travel |
|
Chuck Theta： |
0~30 degree |
Platen Up/Down：
|
6mm Adjustable
|
| Coarse Adjustment： |
Lever-Driven |
|
Platen Up/Down：
Fine Adjustment： |
25 mm Adjustable
Hand Wheel-Driven |
|
Platen： |
12 Micropositioner |
|
Microscope Stage： |
1" x1" Travel |
|
|
|
Requirements |
|
Electrical： |
110 VAC, 60Hz |
|
Vacuum： |
-250 mmHg, 7 liter/min |
|
|
|
Dimensions |
|
780mmW x 660mmD x 700mmH With Microscope |
|
Weight 80 Kg With Microscope |
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|
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Accessories |
|
Wafer Chuck Pull-out Stage |
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Miroscope Tilting Mechanism |
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RF Prone/Cables |
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Active Probes |
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Low Current/Capacitance Probes |
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High Voltage Probe |
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Laser Cutter |
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Ultrasonic Cutter |
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CCTV System |
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Photomicrographics |
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Probe Card holder |
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Packaged Device Holder |
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PCB Holder |
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Thermal Systems |
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Liquid Crystal Kit |
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Vibration Free Table |
|
Shielding Box |
|
Test Bench |
|
Instrument Case with Caster |
|
Dark Field/Normarski Inspection |
|
Chuck Vacuum Pattern |
|
Gold Plated Chuck |
