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[ 特殊顯微鏡設備 | Wafer Probing | 高階多功能型 12"用 ]

Analytical Probe Station/4點探針/探針量測儀
Manual Probe Station for wafer 12 "/高階多功能型12"用

 
Model:BD-12

 

Features

  Huged-Knob Chuck Stage

RF Probing Field Upgradable

20X~4000X Magnification

Backlash-Free Movement

Platen Linear Quick Up/Down

Easy Load/Unload wafer

Platen Linear Fine Up/Down

Probe Card Tip Overdrive Adjustment

Choice Of Microscope (Tilt) Up/Down
For E-Z Revoliving Objectives
 

Specifications

Vacuum Chuck

12" Stainless Steel

Chuck Stage

12" x12" Travel

Chuck Theta

0~30 degree

Platen Up/Down

6mm Adjustable

Coarse Adjustment Lever-Driven

Platen Up/Down

25 mm Adjustable

Fine Adjustment Hand Wheel-Driven

Platen

12 Micropositioner

Microscope Stage

1" x1" Travel

Requirements

Electrical

110 VAC, 60Hz

  220 VAC, 60Hz

Vacuum

-250 mmHg, 7 liter/min

Dimensions

926mmW x 700mmD x 700mmH With Microscope

Weight 150 Kg    With Microscope

Accessories

Wafer Chuck Pull-out Stage

Miroscope Tilting Mechanism

RF Prone/Cables

Active Probes

Low Current/Capacitance Probes

High Voltage Probe

Laser Cutter

Ultrasonic Cutter

CCTV System

Photomicrographics

Probe Card holder

Packaged Device Holder

PCB Holder

Thermal Systems

Liquid Crystal Kit

Vibration Free Table

Shielding Box

Test Bench

Instrument Case with Caster

Dark Field/Normarski Inspection

Chuck Vacuum Pattern

Gold Plated Chuck

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update: 2012-05-08